

Both pure water and ultrapure water are frequently used in industrial production. Although they differ by only one character, they have distinct water quality requirements, preparation processes, and applications. Ultrapure water is typically used in industries with extremely high water quality demands, such as semiconductors, pharmaceuticals, and photovoltaics, whereas pure water has lower purity requirements and is commonly used in industrial production and laboratories. We have listed the detailed differences between ultrapure water and purified water in terms of water quality, treatment processes, and applications.
| Water Quality | Ultrapure Water (UPW) | Purified Water |
|---|---|---|
| Conductivity | < 0.055 μS/cm | 0.1–10 μS/cm |
| Resistivity | ≥ 18.2 MΩ·cm | 0.1 – 10 MΩ·cm |
| Total Organic Carbon (TOC) | < 5 ppb (some applications require < 1 ppb) | 10 – 100 ppb |
| Microbial Content | Nearly zero | Small amounts of microbes allowed |
| Particles | Needs to remove submicron particles (nearly zero) | Some particles allowed, less strict requirements |
| Gas Content | Strictly controls gases such as CO₂, O₂ | Less control over dissolved gases |
| Treatment Process | Ultrapure Water (UPW) | Purified Water |
|---|---|---|
| Pretreatment | Multimedia filtration, activated carbon, softening | Multimedia filtration, activated carbon |
| Core Treatment Steps | Reverse Osmosis (RO) + Electrodeionization (EDI) or mixed bed ion exchange | Reverse Osmosis (RO) |
| Polishing | Mixed bed ion exchange, UV oxidation, microfiltration, and ultrafiltration | Optional: simple ion exchange or UV treatment |
| Post-treatment/Storage | Terminal microfiltration (0.1 μm) + sterile storage | Regular water tanks and distribution systems |
| Online Monitoring | Real-time monitoring of conductivity, TOC, microbes | Typically no need for real-time monitoring |
| Application Area | Ultrapure Water (UPW) | Purified Water |
|---|---|---|
| Semiconductor Industry | Wafer and chip cleaning | Not applicable |
| Pharmaceutical Industry | Injection solutions, drug synthesis (GMP, USP compliance) | General medical use (disinfection, washing) |
| Photovoltaic Industry | Cleaning of photovoltaic cells | Not applicable |
| Nuclear Industry | Cooling water for nuclear reactors | Not applicable |
| Laboratories | High-precision research (e.g., molecular biology, chemistry) | General lab uses (reagent preparation, cleaning) |
| Industrial Production | High-precision manufacturing processes | Boiler feedwater, cooling water, food processing |
Summary
Ultrapure water treatment is more complex, involving multiple filtration and polishing steps, and is used in industries with strict water purity requirements like semiconductors and pharmaceuticals.
Pure water treatment is simpler and is commonly used in less demanding applications like general industrial processes and basic laboratory use.